|
ATLEX-S Specifications
|
|
Gas Medium
|
ArF |
KrF |
Units |
|
Wavelength
|
193 |
248 |
nm |
|
High Voltage Switching Technique
|
Solid State Switch |
Solid State Switch |
|
|
Max. Rep. Rate
|
300 |
500 |
300 |
500 |
Hz |
|
Max. Pulse Energy 1
|
10 |
10 |
15 |
15 |
mJ |
|
Max. Average Power
|
2,4
|
4
|
4
|
6
|
W
|
|
Pulse Duration 2
|
5 – 8 |
ns |
|
Beam Dimensions 2 (V x H)
|
4 x 6 |
mm |
|
Beam Divergence 2 (V x H)
|
1 x 2 |
mrad |
|
Energy Stability (standard deviation)
|
< 3 |
% |
|
Dimensions (LxWxH)
|
630 x 400 x 300 |
mm |
|
Weight
|
65 |
kg |
|
Cooling
|
Air |
|
|
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
|