ATLEX-500-I Specifications
|
Gas Medium
|
F2 |
ArF |
KrF |
XeCl |
XeF |
Units |
Wavelength
|
157 |
193 |
248 |
308 |
351 |
nm |
High Voltage Switching Technique
|
Solid State Switch |
|
Max. Pulse Energy 1
|
1 |
10 |
15 |
8 |
7 |
mJ |
Max. Average Power
|
0.5
|
4.0
|
6.5
|
3.0
|
2.5
|
W
|
Max. Rep Rate
|
500
|
Hz
|
Pulse Duration 2
|
5 – 8 |
ns |
Beam Dimensions 2 (V x H)
|
4 x 6 |
mm |
Beam Divergence 2 (V x H)
|
1 x 2 |
mrad |
Energy Stability (standard deviation)
|
< 3 |
% |
Dimensions (LxWxH)
|
540 x 470 x 370 |
mm |
Weight
|
60 |
kg |
Cooling
|
Air |
|
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
|