The Series 6100 consists of a single chassis supporting up to 3 thermal mass flow controllers, an ozone generation module, a mixing zone, a reaction chamber for gas phase titration, and control electronics.
Multi-Gas Calibration systemCommands are entered from the front panel and displayed on a backlit 4 line by 20 character liquid crystal display. The instrument may also be remotely operated using contact closures or the RS-232 serial data interface, both are standard in the Series 6100.
The 6100 comes standard with two mass flow controllers, but a third can be added to support a larger range of dilutions. The mass flow controllers are calibrated to a NIST (National Institute of Standards and Technology) traceable primary standard. The calibration data consists of a comparison of desired versus actual flow over the full dynamic range of the instrument with linear interpolation between points. Calibration data is stored in non-volatile memory and may be updated by the user with a suitable standard.