Applications
Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
Conductive thin film (Metal, ITO etc)
Silicon-related epitaxial materials, Ion-implantation sample
Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
Sample sizes
2 ~ 8 inch (Option; 12 inch)
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.
*Please refer the measurement range for each probe type as below;
(1) Low ： ０.０１～０.５Ω/□ （０.００１～０.０５Ω‐ｃｍ）
(2) Middle ： ０.５～１０Ω/□ （０.０５～０.５Ω‐ｃｍ）
(3) High ： １０～１０００Ω/□ （０.５～６０Ω‐ｃｍ）
(4) S-High ： １０００～３０００Ω/□ （６０～２００Ω‐ｃｍ）