- It is also possible to measure the thickness of the meniscus lens that was difficult to measure with the contact type
- As the light source uses 1.3 μLD, measurement of Si etc. is also possible.
- Easy measurement with non-contact / non-destructive just by installing in a holder.
- the most strongly-site use in the vibration in the compact is suitable.
- Each thickness can be measured up to the triplet lens
Thông số kỹ thuật
Measurement method: Michelson interferometric
light source: 1.3 μ
Accuracy: ± 1 μ (silicon wafer)
Resolution: 1
μ or less (*) Beam diameter: φ 1
mm ( condensing optical system) Sample thickness: 15 mm (bk - 7)
Measurement time: Min 40 msec (measuring time by the number of integrations is different)
body dimensions: 0.99 × 125 × 180 (mm) (depth X width X height)
signal processing system: 290 × 330 × 140 ( mm ) (depth X width X height)
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