Live imaging of up to 4 detectors
Specimen chamber for specimens with a diameter of 200 mm (8" wafer)
A variety of connection flanges, for EDS, EBSD, CL, IR camera, etc.
Air lock system for fast and clean specimen exchange
Optional systems available for wafers up to 8"
Gentle Beam™ for high resolution imaging at extremely low excitation voltages
filter system electron energy filtering
Optional different specimen stages
Newly designed, intuitive user interface, easy to operate
SEM operation through operating panel and mouse
Additional, conventional SE-detector
Thông số kỹ thuật
| Electron optics |
|
|
Electron source
|
Field emissions (TFEG)
|
|
Acceleration voltage
|
0.01 to 30 kV
|
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SE detection
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in-lens detector with energy filtering
|
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Resolution in SE image
|
1.2 nm at 1kV, 0.8 nm at 15 kV
|
|
Magnification range
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25x bis 1,000,000x
|
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