Our multipurpose Nanuler Calibration Standard is designed for calibration of AFM, SEM, Optical and Mechanical Profilers. Features include step heights, lines, grids, magnification box and spot measurement structures of different pitch. The features are etched into SiO₂ and Si and are optionally available with metal coating for improved reflectivity and reduced static charge.
This multipurpose Nanuler Calibration Standard is designed for calibration of AFM, SEM, Optical and Mechanical Profilers. Features include step heights, lines, grids, magnification box and spot measurement structures of different pitch. The features are etched into SiO2 and Si and are optionally available with metal coating for improved reflectivity and reduced static charges
MAGNIFICATION BOXES: Four concentric boxes (2 µm , 5 µm, 10 µm and 50 µm pitches) can be used to verify magnification and x-y linearity. These structures can be used to check magnification from a few hundred to 50,000x range in SEMs.
GRATINGS: There are 4 different grating patterns with pitches of 3 µm, 10 µm, 20 µm and 50 µm. These structures are designed for x-y calibration of AFM, SEM, TEM and Profilers.
STEP HEIGHT: This well-marked dog bone step height structure is created to provide a unique feature for ease of location. Precise and uniform thermally grown SiO2 is used for less than 1 µm step heights. Silicon steps are formed for features from 5 µm to 25 µm.
GridsGRIDS: These grids can be used for surface topography, roughness, and magnification measurement with most of the SPM and Profilometers that are available in the market. Other applications include focus beams and set/verify Z stage heights by observing the beam scattering.
Thông số kỹ thuật
- Step Material: Si and SiO2
- Nominal Step Heights:
- SiO2 Steps: 100 nm, 200 nm, 500 nm and 1000 nm
- Si Steps: 5 µm, 10 µm and 25 µm
- Metal Coating: Cr coating (optional)
- Traceability: NIST calibrated Standards (Optional)
- Die Size: 8.0 mm x 8.2 mm x 0.5 mm
- Mounting Options: On quartz substrate and metal disc
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