Device configuration and diagnostics made simple through standard Ethernet interface
• Uses a standard web browser with no special software required
• CE Mark and RoHS Compliance - meeting requirements for the European Union
• Fast response to set point change reduces flow stabilization time for short process steps, enhancing process throughput
• Tightly controlled flow accuracy of process gas enables improved process matching
• Reduced inlet pressure (pressure drop) requirement simplifies gas supply regulation from a single source
Thông số kỹ thuật
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