*Programmable multi-gas/multi-range capabilities
*Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
*Sub-1 second flow response time and accuracy of 1% set point for demanding applications
*Well suited for a variety of gases
*Fast response, Hastelloy sensor
*Easily accessible diagnostic service port is independent of tool communication
*Multi-protocol communication options include *DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Thông số kỹ thuật
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Differentiator
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*High Accuracy
*MultiFlo™ Capability
*Compact Size
*Suitable for Full Suite of Gases
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Performance
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Flow Range (Full Scale Capacity)
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*3 sccm - 50 slpm
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Accuracy
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*1% of SP 35-100%, 0.35% of FS 2-35%
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Repeatability
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*0.20% SP
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Linearity
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*±0.5% FS (included in accuracy)
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Response Time
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*Normally Closed Valve: 300 ms - <1 sec
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Multi-Gas & Range Configurability
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*MultiFlo™ Available
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Number of Bins
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*10 Bins
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Control Range
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*2-100%
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Zero Stability
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*<±0.5% FS per year
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Flow Temperature Coefficient
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*Zero: <0.05% of F.S per oC
*Span: <0.1% of S.P. per oC
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Pressure Coefficient
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*0.03% per psi (0-50psi N2)
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Attitude Sensitivity
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*<0.2% F.S. maximum deviation from specified accuracy after re-zeroing
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Ratings
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Temperature Range
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*5-50oC (41-122oF)
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Differential Pressure Range
Controllers
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* 3-860 sccm = 7-45 psid
*861-7200 sccm = 15-45 psid
*7201-55000 sccm = 25-45 psid
- Contact Brooks Technical Support for more information.
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Leak Integrity
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1x10^-9 atm cc/sec He
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Mechanical
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Seal Material
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* Elastomer Seal
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Wetted Materials
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*316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
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Valve Options
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*Normally Closed
*Normally Open
*Meter (no valve)
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Diagnostics
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Diagnostic / Service Port
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*Available
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Elastomer Sealed Thermal SLAMf Series Brooks Instruments