Resolutions to 1 nm at 100 m/s
±1 µm accuracy at 20 °C
Scale thermal coefficient of expansion at 20 °C: 0.75 ±0.35 µm/m/°CVery high accuracy combined with near zero thermal expansion
Excellent motion control performance
Wide set-up tolerances
Protocols available: BiSS®, Panasonic
Readhead size: 36 x 16.5 x 17.2 mm
Low outgasing for vacuum environments
Less than 10 nm RMS jitter for improved positional stability
±40 nm Sub-Divisional Error for smooth velocity control
Thông số kỹ thuật
    
        
            | Measuring standard | RELA: absolute coded high accuracy ZeroMet spar scale | 
        
            | Readhead size (LxWxH) | 36 mm x 16.5 mm x 17.2 mm | 
        
            | Scale pitch | Nominal 30 μm | 
        
            | Thermal expansion coefficient at 20 °C | 0.75 ±0.35 μm/m/°C | 
        
            | Accuracy grade at 20 °C | Certified to ±1 μm, calibration traceable to International Standards | 
        
            | Scale length | Some BiSS C protocol variants have limited maximum length (See data sheet for details) 80 mm to 1.5 m | 
        
            | Maximum speed | (See data sheet for details) Up to 100 m/s | 
        
            | Protocols* | BiSS C                Panasonic | 
        
            | Resolutions | BiSS C: 50 nm, 5 nm and 1 nm resolutions Panasonic: 100 nm, 50 nm and 1 nm resolutions | 
        
            | Sub-Divisional Error (SDE) | ±40 nm | 
        
            | Electrical connection | Up to 10 m cable lengths with flying lead | 
        
            | Power supply | 5 V ±10%, max 250 mA @ 5 V (terminated) | 
        
            | Vibration (operating) | 100 m/s2 max @ 55 Hz to 2 000 | 
        
            | Shock (non-operating) | 1 000 m/s2, 6 ms, ½ sine | 
        
            | Operating temperature | 0 °C to +75 °C | 
        
            | Bake-out temperature (non-operating) | 120 °C | 
        
            | Sealing | IP30 | 
        
            | Cable construction | Silver-coated copper braided single screen. FEP core insulation, over tin-plated copper wire. |